CIGS Evaporation System
- Modified Varian 3125 with high capacity diffusion pump
- Five independently-controlled sources
- Luxel Radak II furnaces for Cu, In and Ga
- Specialty heaters for Se and Na
- Uniform films over 10 x 10 cm substrate area
- Planetary substrate holder available for multisubstrate deposition
- Inficon XTC controller for in situ measurement molecular flux
- Fully automated pressure, furnace and substrate temperatures
- Cold trap with Polycold refrigerant
- Halogen substrate heating
Pictures may be found on the graphic version.
Hawaii Natural Energy Institute
1680 East-West Road, POST 109
Honolulu, HI 96822
Phone: (808) 956-8890
Fax: (808) 956-2336
Email: hnei@hawaii.edu
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This page was last updated on Monday, December 9, 2002
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