Thermal Evaporation System

• NRC 3117 diffusion pump station with cold trap
• Four source terminals rated to 20kVA
• Voltage taps of 5, 10, 20 & 40V
• Variable transformer for heater current control
• Inficon XTM in situ film thickness monitor

Pictures may be found on the graphic version.

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Hawaii Natural Energy Institute
1680 East-West Road, POST 109
Honolulu, HI 96822
Phone: (808) 956-8890
Fax: (808) 956-2336
Email: hnei@hawaii.edu

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This page was last updated on Monday, December 9, 2002

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