Sputtering System

• Modified PE 2400 with LH 450 l/s turbomolecular pump
• Three magnetron sputtering guns (AJA International, 2")
• Flexible magnet configuration for rate optimization
• DC or RF plasma power option
• Mass flow controllers (MKS) for precise metering of gas mixtures
• Inficon XTM in situ film thickness monitor
• Fully automated flow, substrate temperature, plasma power
• Halogen substrate heaters

Pictures may be found on the graphic version.

Facilities Menu

• Fuel Cell Test Facility
• Thin Films Lab
• Renewable Resources Research Lab
• Ocean Resources and Applications Laboratory
• Electrochemical Power Systems Lab
• Biomass and Fuels Processing Lab

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Contact Us

Hawaii Natural Energy Institute
1680 East-West Road, POST 109
Honolulu, HI 96822
Phone: (808) 956-8890
Fax: (808) 956-2336
Email: hnei@hawaii.edu

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This page was last updated on Monday, December 9, 2002

[GRAPHIC VERSION]