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University of Hawaii at Manoa
Hawaii Natural Energy Institute
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School of Ocean & Earth Science & Technology University of Hawai'i at Manoa

 
CIGS Evaporation System
  • Modified Varian 3125 with high capacity diffusion pump
  • Five independently-controlled sources
    • Luxel Radak II furnaces for Cu, In and Ga
    • Specialty heaters for Se and Na
  • Uniform films over 10 x 10 cm substrate area
  • Planetary substrate holder available for multisubstrate deposition
  • Inficon XTC controller for in situ measurement molecular flux
  • Fully automated pressure, furnace and substrate temperatures
  • Cold trap with Polycold refrigerant
  • Halogen substrate heating
system

chamber

CIS device

Hawaii Natural Energy Institute • 1680 East West Road, POST 109 • Honolulu, HI 96822
Ph: (808) 956-8890 • Fax: (808) 956-2336 • Email: hnei@hawaii.edu
This page last updated on Thursday, December 9, 2004.
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