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University of Hawaii at Manoa
Hawaii Natural Energy Institute
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Employee Site
CIGS Evaporation System
Modified Varian 3125 with high capacity diffusion pump
Five independently-controlled sources
Luxel Radak II furnaces for Cu, In and Ga
Specialty heaters for Se and Na
Uniform films over 10 x 10 cm substrate area
Planetary substrate holder available for multisubstrate deposition
Inficon XTC controller for in situ measurement molecular flux
Fully automated pressure, furnace and substrate temperatures
Cold trap with Polycold refrigerant
Halogen substrate heating
system
chamber
CIS device