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CIGS Evaporation System
- Modified Varian 3125 with high capacity diffusion pump
- Five independently-controlled sources
- Luxel Radak II furnaces for Cu, In and Ga
- Specialty heaters for Se and Na
- Uniform films over 10 x 10 cm substrate area
- Planetary substrate holder available for multisubstrate deposition
- Inficon XTC controller for in situ measurement molecular flux
- Fully automated pressure, furnace and substrate temperatures
- Cold trap with Polycold refrigerant
- Halogen substrate heating
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