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Thermal Evaporation System
- NRC 3117 diffusion pump station with cold trap
- Four source terminals rated to 20kVA
- Voltage taps of 5, 10, 20 & 40V
- Variable transformer for heater current control
- Inficon XTM in situ film thickness monitor
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| system |
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| chamber |
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| evaporated metal grids |
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