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University of Hawaii at Manoa
Hawaii Natural Energy Institute
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Employee Site
Thermal Evaporation System
NRC 3117 diffusion pump station with cold trap
Four source terminals rated to 20kVA
Voltage taps of 5, 10, 20 & 40V
Variable transformer for heater current control
Inficon XTM in situ film thickness monitor
system
chamber
evaporated metal grids
